Tipless Noncontact (NSC) and Contact (CSC) three-lever silicon probes

Probes of the Tipless Series feature 3 tipless cantilevers with different spring constants and resonance frequencies on one side of the chip. This series replaces the former 12 Series.

Backside coating:
Al BS  ............................................................ Al 30 nm
no Al ............................................................ no

Cr-Au coated
Au overall coating ............................................................30 nm
Cr overall sublayer ............................................................20 nm

Technical Features

Cantilever SeriesAvailable CoatingsLength l- ± 5 µmWidth w, ± 3 μmThickness ± 0.5 μmResonance Frequency kHz TipicaResonance Frequency kHz RangeForce Constant Nm typical Const. Force Nm Range
HQ:NSC35Tipless
lever ANo Al - Al BS- Cr-Au110352.0205130 - 2908.92.7 - 24
lever BNo Al- Al BS- Cr-Au90352.0300185 - 430164.8 - 44
lever CNo Al- Al BS- Cr-Au130352.015095 - 2055.41.7 - 14
HQ:NSC36Tipless
lever ANo Al- Al BS- Cr-Au11032.51.09030 - 1601.00.1 - 4.6
lever BNo Al- Al BS- Cr-Au9032.51.013045 - 24020.2 - 9
lever CNo Al- Al BS- Cr-Au13032.51.06525 - 1150.60.06 - 2.7
HQ:CSC37Tipless
lever ANo Al- Al BS- Cr-Au250352.04030 - 550.80.3 - 2
lever BNo Al- Al BS- Cr-Au350352.02015 - 300.30.1 - 0.6
lever CNo Al- Al BS- Cr-Au300352.03020 - 400.40.1 - 1
HQ:CSC38Tipless
lever ANo Al- Al BS- Cr-Au25032.51.020mar-620.090.01 - 0.36
lever BNo Al- Al BS- Cr-Au35032.51.010apr-800.030.003 - 0.13
lever CNo Al- Al BS- Cr-Au30032.51.014set-070.050.005 - 0.21