The first macroscopic configuration of reflection DHM®. It enables measurement of 3D topography with large field of view up to 32 x 32 mm. As others DHM® products, the macro-sensor is a non-scanning instruments recording 3D topography at unrivaled acquisition speed.
This new patented technology opens new applications where a sub-nanometric vertical resolution is required within an extended field of view compare to standard microscope configuration.
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The macro-sensor has been developed for automated measurement, all the critical component s are accessible out of the sensor body :
- Camera & fiber port on top
- External laser source
- Long working distance : 30mm
- No moving part inside the body
The holographic macroscope has a fixed field of view. Available in single and dual wavelength configurations depending on user needs.
Standalone configuration equipped with a motorized stage is ideal for R&D and semi-automation. Head only configuration is available for integration on larger equipment.
Technical Features
- Field of view : 32 mm x 32 mm
- Lateral resolution : 35 um
- Vertical resolution : 0.5 nm
- Working distance : 30 mm
- Acceptance angle : 0.15°