Vacuum chamber compatible with Lyncée Tec DHM

Schaefer Italy is proud to announce that a new option for Lyncée Tec DHM-R is now available. A vacuum set-up has been developed to perform  DHM measurements on samples in vacuum and in controlled gas environment. As described on Lynceetec.com in the option section, the V400 structure consists on following components:

• 400x400x400mm vacuum chamber with a pump, pressure gauge, and accessories
• Adapted column to hold the DHM head
• viewport compatible with glass corrected objectives up to 40x magnification
• 100x100x38 mm motorized stage with controller and connection feedthroughs

Measurement under controlled environmental conditions is a unique feature of DHM.  It opens new research and application possibilities for 3D profilometry, meeting customers’ needs and expectations:

• MEMS characterization under vacuum:  vacuum is required to determine resonance parameters of MEMS, e.g. inertial devices such as accelerometer and gyroscope
• Pressure sensor characterization:  controlled pressure is necessary to determine the relationship between the membrane displacement and the applied pressure

Additionally to the vacuum chamber, this system can combined with:

• Peltier-element (thermoelectric cooler) to control heating and cooling of the sample (-100°C to +200°C)
• Micro-manipulators equipped with 45° micro-mirrors to measure the edges of the samples, and for electrical probing.

It has got a competitive price compared to other similar systems, but without a vacuum chamber. DHM MEMS Analyzer is definitely a competitive solution, as explained in the competitive comparison on the Holographic MEMS Analyzer webpage.

Please contact us for more details.