Universal lab measuring system with up to 4 exchangeable objectives and automated objective recognition.
Typical applications:
- micro geometries
- roughness and micro structures
- nano structures down to single atom layers
Files
| Attachment | Size |
|---|---|
 smartWLI extended - GBS ILmenau - Brochure | 707.67 KB |
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Technical Features
| Measurement HEAD | |
|---|---|
| Measurement Principle | White-light interferometry |
| Z-positioning System | Piezo-based |
| Height measuring range [µm] | Up to 350 |
| Measurement Array [Pixel] | 1936x1216 |
| Light source [nm] | LED 542 |
| Vertical resolution [nm] | PSI: 0.1, VSI: 1.0 |
| Max scan speed [µm/s] | 48 |
| Meas. Head overall dimension [mm³] | 235 x 80 x 128 (HxWxD) |
| Measuring head mass [kg] | 2 |
| Computer, OS | PC or Laptop with Windows 7 |
| Measurement time by z-range 20 μm [s] | <3 |
| Operating temperature [°C] | 10 - 35 |
| Recommended working temperature [°C] | 18 - 22 |
| software | |
|---|---|
| smartWLI | Windows 7, 64bit Software for measuring the topography and for exporting the 3-D data using a direct interface to the MountainsMap® analysis software |
| smartWLI-SDK | SDK for measuring the topography for using in customer own software, Matlab or LabVIEW |
| Export format | ASCII, SUR, BCR-STM, BMP, JPEG, TIFF |
| MountainsMap® | Extensive analysis software as well as profile and 3-D visualisation, measurement data pre- and post-processing, DIN EN ISO roughness and height determination, serial processing, measurement logging |
| OBJECTIVES | ||||||
|---|---|---|---|---|---|---|
| Magnification (MAG) | 2.5x | 5x | 10x | 20x | 50x | 100x |
| Numerical Aperture (NA) | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| Working distance (WD) [mm] | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| Field of view (FOV) [μm] | 7203 x 4524 | 3601 x 2262 | 1800 x 1131 | 900 x 565 | 360 x 226 | 180 x 113 |
| Pixel size [μm] | 3.72 | 1.86 | 0.93 | 0.47 | 0.19 | 0.09 |
| Optical resolution by Dawes [μm] | 3.61 | 2.08 | 0.90 | 0.68 | 0.49 | 0.39 |
| STANDS | |
|---|---|
| Mobile Stand | Suitable for mounting on rollers larger a diameter of 60 mm or planar objects |
| Manual Stand |
Manual XY-Stage (movement 73 x 55 mm²) |
| Motorized Stand 75 x 50 | Motorized XY-Stage (movement 75 x 50 mm²) |
| Motorized Stand 100 x 100 | Motorized XY-Stage (movement 100 x 100 mm²) |
| Individual Stand | On request |
Components |
|---|
Industrial 19” rack with 6 height units including housing |
PC |
scanning device controller |
LED light controller |
XY positioning system controller (optional) |
measuring points | 2456 x 2054 |
scanning speed full resolution | 77 Hz |
scanning speed ROI | up to 2 kHz |
objective / magnification | 5X | 10X | 20X | 50X | 100X | 115X* |
|---|---|---|---|---|---|---|
working distance / mm | 9.3 | 7.4 | 4.7 | 3.4 | 2 | 0.7 |
measuring field / mm² | 3.4 x 2.8 | 1.7 x 1.4 | 0.85 x 0.71 | 0.34 x 0.28 | 0.17 x 0.14 | 0.15 x 0.12 |
point spacing / µm | 1.4 | 0.69 | 0.35 | 0.14 | 0.07 | 0.06 |
measuring points | 1920 x 1200 |
scanning speed full resolution | 169 Hz |
scanning speed subsampling | 533 Hz |
scanning speed ROI | up to 3.2 kHz |
objective / magnification | 5X | 10X | 20X | 50X | 100X | 115X* |
|---|---|---|---|---|---|---|
working distance / mm | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 | 0.7 |
measuring field / mm² | 3.7 x 2.3 | 1.8 x 1.2 | 0.91 x 0.58 | 0.37 x 0.23 | 0.18 x 0.12 | 0.16 x 0.1 |
point spacing / µm | 1.9 | 0.96 | 0.48 | 0.19 | 0.1 | 0.08 |
*Olympus 100x WLI objective – the mentioned magnification is calculated in relation to the 100x Nikon objective
max. / coarse positioning range (manual Z positioning) | 70 mm |
fine positioning range (manual Z positioning) | 1.9 mm |
Tilting angle (levelling device) | ± 3° |
positioning area | movement | load capacity | resolution | orthogonality | encoder |
|---|---|---|---|---|---|
73 x 55 mm² | manual | 1 Kg | - | - | - |
75 x 50 mm² | motorized | 1 Kg | 0.01 µm | less than 10arcsec | optional |
100 x 100 mm² | motorized | 2 kg | 0.01 µm | less than 10arcsec | optional |
150 x 150 mm² | motorized | 3 kg | 0.01 µm | less than 10arcsec | optional |
200 x 200 mm² | motorized | 3 kg | 0.01 µm | less than 10arcsec | optional |
300 x 300 mm² | motorized | 5 kg | 0.01 µm | less than 5arcsec | optional |