The next generation of high-performance profilometers from GBS
The Smart WLI Next from GBS Ilmenau Gmbh is a universally applicable 3D sensor for nanostructures and micro-geometries.
It has a motorized turret carrying up to four objectives. This means that the compact sensor, which works with white light interferometry, can be used in measuring machines that require a lens change during the measuring process without manual intervention. The scanning software has been also improved so that the maximum measuring speed of all sensors in this series, as well as the resolution in xyz, could be faster than before. While the smallest surface structures can be evaluated even on super-polished surfaces such as the crystal mirror, it is also possible to measure large areas many times faster than before, even with the increased resolution.
For this purpose, the surface is analyzed in a first step with a scan speed of over 1 mm/s and the necessary measuring range for the high-resolution measurement is limited. Even with a high position tolerance and inclined surfaces with a height difference of several 100μ, individual measurements can be carried out from 1 to 2s and larger areas with several 100μ individual measurements can be recorded in a few minutes.
Files
| Attachment | Size |
|---|---|
 Smart WLI NEXT - Brochure | 541.83 KB |
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Technical Features
measurement technique | white-light interferometry |
measurement software | smartVIS3D |
evaluation software | MountainsMap® with optional GBS add-on modules |
scanning device | piezo positioning system |
scan range | 200 µm |
extended scanning range | optional with (additional) motorized scanning axis up to 200 mm |
digitalization | up to 0.01 pm |
system noise / topography reproducibility Nm* | < 0.08 nm (5 MP camera) / < 0.12 nm (2.3 MP camera) |
1-σ reproducibility 0.4 µm step height | < 1 nm |
1-σ reproducibility 12 µm step height | < 3 nm |
1-σ reproducibility 100 µm step height | < 20 nm |
sensor weight | approx. 5 kg |
relative humidity, non-condensing | up to 80% |
operation temperature | 10 °C to 35 °C |
power supply | 100 to 240 VAC, 50/60 Hz |
*Sq/√2 – profile difference of 2 scans, 10x objective, EPSI, single scan, without profile averaging, laboratory conditions, 1 million points after 3x3 denoising filter
2.3 MP high speed camera | 5 MP high speed camera | |
|---|---|---|
camera speed full resolution | 169 Hz (1920 x 1200 measuring points) | 77 Hz (2456 x 2054 measuring points) |
scanning speed full resolution | 11,4 µm/s | 5.2 µm/s |
scanning speed full resolution | 56 µm/s | 26 µm/s |
camera speed subsampling | 533 Hz (960 x 600 measuring points) | subsampling not available |
scanning speed subsampling | 35,7 µm/s | subsampling not available |
scanning speed subsampling | 178,5 µm/s | subsampling not available |
camera speed medium ROI | 1.4 kHz (400 x 400 measuring points) | 340 Hz (2456 x 400) measuring points) |
scanning speed medium ROI | 93,8 µm/s | 22,8 µm/s |
scanning speed medium ROI | 469 µm/s | 114 µm/s |
camera speed small ROI | 3.2 kHz (1920 x 36 measuring points) | 2 kHz (2456 x 2 measuring points) |
scanning speed small ROI | 214,4 µm/s | 134 µm/s |
scanning speed small ROI | 1.072 µm/s | 670 µm/s |
ROI | increased speed for less camera lines and rows | increased speed for less lines |
data calculation | real time calculation of the 3d data on a GPGPU (general purpose graphic processing unit) with up to 10 TFLOPS | real time calculation of the 3d data on a GPGPU (general purpose graphic processing unit) with up to 10 TFLOPS |
supported scanning increments | 1x, 3x, 5x, 7x, 11x | 1x, 3x, 5x, 7x, 11x |
high-speed "prescan" | the "prescan" can be used to determine and reduce the necessary z-range for high resolution measurements automatically | the "prescan" can be used to determine and reduce the necessary z-range for high resolution measurements automatically |
magnification | 5x | 10x | 20x | 50x | 100x | 115x* |
|---|---|---|---|---|---|---|
working distance / mm | 9.3 | 7.4 | 4.7 | 3.4 | 2 | 0.7 |
aperture | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | 0.8 |
2.3 MP Camera - measuring field / mm² | 3.7 x 2.3 | 1.8 x 1.2 | 0.91 x 0.58 | 0.37 x 0.23 | 0.18 x 0.12 | 0.16 x 0.1 |
2.3 MP Camera - point spacing camera / µm | 1.9 | 0.96 | 0.48 | 0.19 | 0.1 | 0.08 |
2.3 MP Camera - spacing super resolution / µm | 0.63 | 0.32 | 0.16 | 0.063 | 0.033 | 0.027 |
5 MP camera - measuring field / mm² | 3.4 x 2.8 | 1.7 x 1.4 | 0.85 x 0.71 | 0.34 x 0.28 | 0.17 x 0.14 | 0.15 x 0.12 |
5 MP camera point spacing camera / µm | 1.4 | 0.69 | 0.35 | 0.14 | 0.07 | 0.06 |
5 MP camera - spacing super resolution / µm | 0.47 | 0.23 | 0.12 | 0.047 | 0.023 | 0.02 |
*115x objective –100x objective with a calculated relative magnification in relation to the 100x Nikon objective
max. / coarse positioning range (manual z positioning) | 70 mm |
fine positioning range (manual z positioning) | 1.9 mm |
tilting angle (levelling device) | ± 3° |
positioning area | movement | load capacity | resolution | orthogonality | encoder |
73 x 55 mm² | manual | 1 kg | - | - | - |
75 x 50 mm² | motorized | 1 kg | 0.01 µm | <10arcsec | optional |
100 x 100 mm² | motorized | 2 kg | 0.01 µm | <10arcsec | optional |
150 x 150 mm² | motorized | 3 kg | 0.01 µm | <10arcsec | optional |
200 x 200 mm² | motorized | 3 kg | 0.01 µm | <10arcsec | optional |
300 x 300 mm² | motorized | 5 kg | 0.01 µm | <5arcsec | optional |
Components |
|---|
Industrial 19" rack with housing |
High performance PC |
Scanning device controller |
LED light controller |
XY positioning system controller (optional) |