HFM-300 Flow Meter, HFC-302 Flow Controller

The Teledyne Hastings HFM-300 is used to measure mass flow rates in gases. In addition to flow rate measurement, the HFC-302 includes a proportional valve to accurately control gas flow. The Hastings mass flow meter (HFM-300) and controller (HFC-302), hereafter referred to as the Hastings 300 series, are intrinsically linear and are designed to accurately measure and control mass flow over the range of 0-5 sccm to 0-10 slm with an accuracy of better than ±0.75% F.S. at 3σ from the mean (versions >10 slm are ±1.0% F.S.) . Hastings mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi/3.45MPa) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen) then a correction factor is used to adjust the output for the intended gas. Calibrations for other gases, such as oxygen, helium and argon, are available upon special order.

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Operation of a mass flow controller using HFM-300 or HFC-302

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