Photomask Repair with Adama Innovations atomically sharp and ultra-strong tips

Photomask Repair - Adama Innovations atomically sharp and ultra-strong tips
Post publication date: 
Thursday, February 25, 2021

New Photomask Repair Application Note. Come see how Adama Innovations atomically sharp and ultra-strong tips can help!

  1. Defect Repair - Repair of two photomask edge defects by machining the edge with a sharp robust diamond probe. Acquired using an Asylum Research Cypher-S AFM using an Adama Innovations Photo Mask probe.
  2. Cleaning - Cleaning of a photomask using a sharp robust diamond probe. A significant amount of debris is removed from the surface without damaging the photomask. Acquired using an Asylum Research Cypher-S AFM using an Adama Innovations Photo Mask probe
  3. Writing - Writing new photomask features using a sharp robust diamond probe. Here four new features are cut into the chrome of the photomask. Acquired using an Asylum Research Cypher-S AFM using an Adama Innovations Photo Mask probe.

Documents and Files 

AttachmentSize
PDF icon Photomask Repair - Application Note - Download11.74 MB

Related products 

High Aspect Ratio (HAR) AFM probe made of single crystal diamond Adama Innovations
High Aspect Ratio AFM probe made of single crystal diamond

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Adama Innovations