GBS Ilmenau - Unique profilometry features presented at the Control Show 2019

GBS ILmenau has exhibited their instruments at the Control Show in Stuttgart at the beginning of May. As many competitors they wanted to demonstrate their capabilities. Since not everyone had the opportunity to visit the exhibition we've picked up a few applications in the form of 3D scans.

There aren't many devices on the market which combine the abilities to measure structures with the height up to several mm combined with the ability to measure structures with max. height below 1 nm. Once you find a device, which can measure the same samples with a similar resolution - we doubt that it can do it with the same resolution and the same speed.

Check the video here below for:

• crack area with mm structures
• honing structures measured in a tube with 30 mm diameter
• roughness standard Ra 25 nm
• wafer polishing with scratches below 1 nm
• sharp cutting edge measured with a 20x objective
• membrane measured with a single scan
• siemens star proving the lateral resolution
• insert - live digitalization with an height resolution of 1 nm and an point density of 2 µm in 2 min.
• glass blasted surface with shine concave areas
• sharp needle with highly sloped flanks
• large grinded area
• solder points / planarity test
• line structures with a width below 0.1 µm